$6,520.00 Original price was: $6,520.00.$2,850.00Current price is: $2,850.00.
The ZYGO ZMI-2002 8020-0211 is a high-performance dual-axis laser measurement board based on VME bus, designed for nanoscale precision displacement and surface morphology measurement in semiconductor, optical, and precision manufacturing fields.
| Parameter | Details |
|---|---|
| Model | ZYGO ZMI-2002 (Part No.: 8020-0211; Variant: 8020-0211-1-J) |
| Manufacturer | ZYGO Corporation |
| Product Type | Dual-axis Laser Measurement Board (Precision Metrology Component) |
| Core Functions | Dual-axis synchronous displacement measurement; surface morphology analysis; nanoscale precision data acquisition; VME bus communication |
| Laser Wavelength | 633 nm |
| Measurement Range | X-axis: 50 mm; Y-axis: 25 mm |
| Resolution | < 1 nm |
| Accuracy | ± 0.1 µm |
| Interface | VME bus; Simplified P2 interface (for system integration) |
| Operating Temperature Range | 0°C to +40°C |
| Storage Temperature Range | -40°C to +85°C (industrial-grade component standard) |
| Relative Humidity | 20% – 80% RH (non-condensing) |
| Protection Rating | IP54 |
| Dimensions (L × W × H) | 229 mm × 114 mm × 29 mm |
| Weight | 1.2 kg |
| Mounting Type | VME chassis-mounted |
| Certifications | Compliant with industrial metrology equipment standards |
| System Compatibility | ZYGO Metro Pro, MX™ software; Servo cards, motor controllers via bus |
| Applications | Semiconductor wafer inspection, optical component manufacturing, precision machining, surface morphology analysis |

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