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AMAT 0010-23716 Automatic RF Match Network Module

Original price was: $1,980.00.Current price is: $1,450.00.

The AMAT 0010-23716 is a high-precision automatic RF match network module designed for AMAT semiconductor etching and deposition systems, delivering real-time impedance matching and stable RF power transmission to ensure consistent process performance in advanced wafer fabrication steps.

SKU: 0010-23716 Category:
Description
Parameter Details
Model 0010-23716
Manufacturer Applied Materials (AMAT)
Product Type High Precision Automatic RF Match Network Module
Compatible Equipment AMAT Centura®, Endura®, Producer® Series Semiconductor Etching & Deposition Systems
Operating RF Frequency 13.56 MHz (±0.05%)
Rated Continuous RF Power 3000 W
Impedance Matching Range 10 Ω to 1000 Ω (real part), -500 Ω to +500 Ω (imaginary part)
Matching Response Time ≤ 10 ms
Control Interface RS-232 Serial, DeviceNet
Rated Supply Voltage 24 V DC (±10%)
Typical Power Consumption 120 W
Operating Temperature 0°C to +50°C
Storage Temperature -40°C to +85°C
Dimensions (W×H×D) 482.6 mm × 133.4 mm × 508 mm
Net Weight 18.6 kg
Main Body Material 6061 Aluminum Alloy
Cooling Method Forced Air Cooling
Protection Rating IP30
Compliance Certifications CE, RoHS, SEMI S2 Compliant
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