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0100-71275
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AMAT 0190-73524
AMAT 0190-73524 VME Bus Single-Board Control Module Original price was: $1,650.00.Current price is: $1,390.00.
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AMAT 0190-30354
AMAT 0190-30354 Industrial Temperature Control Module Original price was: $2,960.00.Current price is: $1,960.00.

AMAT 0100-71275 Gas Distribution Component

Original price was: $1,960.00.Current price is: $1,170.00.

The AMAT 0100-71275 is a high-precision gas distribution component designed for AMAT Centura® and Endura® series semiconductor etching and CVD/ALD deposition systems, delivering uniform process gas flow into the process chamber to ensure consistent and high-quality wafer fabrication performance.

SKU: AMAT 0100-71275 Category:
Description
Parameter Details
Model 0100-71275
Manufacturer Applied Materials (AMAT)
Product Type High Precision Gas Distribution Component
Compatible Equipment AMAT Centura®, Endura® Series Semiconductor Etching & CVD/ALD Deposition Systems
Compatible Wafer Size 200mm / 300mm
Core Material Anodized Aluminum, Quartz, Ceramic-Coated 316L Stainless Steel
Outer Diameter 380 mm
Thickness 25 mm
Net Weight 6.5 kg
Single Channel Gas Flow Range 10 sccm to 1000 sccm
Operating Temperature Range 50°C to 500°C
Operating Pressure Range Atmospheric pressure to 10⁻⁶ Torr (high vacuum)
Compatible Gases Inert (Ar, N₂), Reactive (SiH₄, O₂, NH₃), Corrosive (Cl₂, CF₄, WF₆) Gases
Control Interface Integrated with equipment PLC for automated flow/pressure adjustment
Protection Rating IP40
Mounting Method Chamber internal fixed installation
Compliance Certifications SEMI S2 Compliant, RoHS Certified
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