8010-0105-02 ZMI-501 ZYGO Dual - axis precision displacement measuring interferometer
8010-0105-02 ZMI-501 ZYGO Dual - axis precision displacement measuring interferometer Original price was: $4,500.00.Current price is: $1,850.00.
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ZYGO ZMI-4004 4-Axis 6U VME64x Measurement Board 8020-0500-01

Original price was: $5,980.00.Current price is: $3,199.00.

The ZYGO ZMI-4004 (Part No.: 8020-0500-01) is a high-performance 4-axis 6U VME64x measurement board, a core component for displacement measuring interferometers, enabling sub-nanometer precision measurement in advanced metrology and semiconductor applications.

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Description
Parameter Details
Model ZYGO ZMI-4004 (Part No.: 8020-0500-01)
Manufacturer ZYGO Corporation
Product Type 4-Axis 6U VME64x Measurement Board (Precision Metrology Component)
Core Functions 4-axis displacement measurement; sub-nanometer data acquisition;
10 MHz data rate; cyclic error compensation
Number of Measuring Axes 4
Position Resolution 0.15 nm
Maximum Velocity ±2.55 m/s
Accuracy (σ at max velocity) 0.2 nm
Data Rate 10 MHz
Minimum Optical Power 1.0 µW
Interface 6U VME64x; ST fiber optic; HSSDC electrical
Power Supply 24 V DC
Operating Temperature Range 0°C to +55°C
Storage Temperature Range -40°C to +85°C (industrial-grade component standard)
Relative Humidity 20% – 80% RH (non-condensing)
Dimensions (L × W × H) 317.5 mm × 160 mm × 40.6 mm (standard 6U VME form factor)
Weight 1.36 kg (3 lbs)
Mounting Type 6U VME chassis-mounted
Compatible Lasers ZYGO 7702, 7714, 7724 series
Applications Semiconductor lithography, optical fabrication,
ultra-precision machining, advanced metrology
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