$5,980.00 Original price was: $5,980.00.$3,199.00Current price is: $3,199.00.
The ZYGO ZMI-4004 (Part No.: 8020-0500-01) is a high-performance 4-axis 6U VME64x measurement board, a core component for displacement measuring interferometers, enabling sub-nanometer precision measurement in advanced metrology and semiconductor applications.
| Parameter | Details |
|---|---|
| Model | ZYGO ZMI-4004 (Part No.: 8020-0500-01) |
| Manufacturer | ZYGO Corporation |
| Product Type | 4-Axis 6U VME64x Measurement Board (Precision Metrology Component) |
| Core Functions | 4-axis displacement measurement; sub-nanometer data acquisition; 10 MHz data rate; cyclic error compensation |
| Number of Measuring Axes | 4 |
| Position Resolution | 0.15 nm |
| Maximum Velocity | ±2.55 m/s |
| Accuracy (σ at max velocity) | 0.2 nm |
| Data Rate | 10 MHz |
| Minimum Optical Power | 1.0 µW |
| Interface | 6U VME64x; ST fiber optic; HSSDC electrical |
| Power Supply | 24 V DC |
| Operating Temperature Range | 0°C to +55°C |
| Storage Temperature Range | -40°C to +85°C (industrial-grade component standard) |
| Relative Humidity | 20% – 80% RH (non-condensing) |
| Dimensions (L × W × H) | 317.5 mm × 160 mm × 40.6 mm (standard 6U VME form factor) |
| Weight | 1.36 kg (3 lbs) |
| Mounting Type | 6U VME chassis-mounted |
| Compatible Lasers | ZYGO 7702, 7714, 7724 series |
| Applications | Semiconductor lithography, optical fabrication, ultra-precision machining, advanced metrology |

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