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8010-0105-02 ZMI-501 ZYGO Dual - axis precision displacement measuring interferometer
8010-0105-02 ZMI-501 ZYGO Dual - axis precision displacement measuring interferometer Original price was: $4,500.00.Current price is: $1,850.00.

ZYGO ZMI-2002 8020-0211 Dual-axis Laser Measurement Board

Original price was: $6,520.00.Current price is: $2,850.00.

The ZYGO ZMI-2002 8020-0211 is a high-performance dual-axis laser measurement board based on VME bus, designed for nanoscale precision displacement and surface morphology measurement in semiconductor, optical, and precision manufacturing fields.

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Description
Parameter Details
Model ZYGO ZMI-2002 (Part No.: 8020-0211; Variant: 8020-0211-1-J)
Manufacturer ZYGO Corporation
Product Type Dual-axis Laser Measurement Board (Precision Metrology Component)
Core Functions Dual-axis synchronous displacement measurement; surface morphology analysis;
nanoscale precision data acquisition; VME bus communication
Laser Wavelength 633 nm
Measurement Range X-axis: 50 mm; Y-axis: 25 mm
Resolution < 1 nm
Accuracy ± 0.1 µm
Interface VME bus; Simplified P2 interface (for system integration)
Operating Temperature Range 0°C to +40°C
Storage Temperature Range -40°C to +85°C (industrial-grade component standard)
Relative Humidity 20% – 80% RH (non-condensing)
Protection Rating IP54
Dimensions (L × W × H) 229 mm × 114 mm × 29 mm
Weight 1.2 kg
Mounting Type VME chassis-mounted
Certifications Compliant with industrial metrology equipment standards
System Compatibility ZYGO Metro Pro, MX™ software; Servo cards, motor controllers via bus
Applications Semiconductor wafer inspection, optical component manufacturing,
precision machining, surface morphology analysis
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